You don't just want a mask image that will give you an acceptable pattern at exact focus and dose. You want the pattern on the wafer to be acceptable over a reasonable range of focus and dose errors and variations in resist.  -   Andrew Moore     Quotes
You don't just want a mask image that will give you an acceptable pattern at exact focus and dose. You want the pattern on the wafer to be acceptable over a reasonable range of focus and dose errors and variations in resist. Andrew Moore
 Focus